DTE Series
Features
Feature
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Certification Standards
All models fully comply with CE and relevant EU standards.
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Wetted Parts Material
All wetted parts are crafted from PURE Teflon, delivering exceptional chemical resistance, high-temperature durability, and a clean, contamination-free performance
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Temperature Resistance
Capable of withstanding gas and liquid temperatures up to 180°C.
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Manufacturing Environment
Assembly and testing are fully completed within a Class 100 cleanroom environment.
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Control System Integration
Electrically Controlled Precision Drive for Enhanced Process Control.
Application
Application
Photoresist Coaters, Coater Track, Wafer Cleaning Equipment, Etching Equipment, CMP (Chemical Mechanical Planarization) Equipment , Wet Processing Equipment
Wet Processing Cleaning Lines, Chemical Replenishment / Dosing Systems
Chemical Supply & Delivery, Transfer of Corrosive Chemicals (Strong Acids and Alkalis), Precision Laboratory Chemical Metering & Transfer
Model
Model
Technical Data
Performance Curve
Technical Data
Performance Curve
Technical Data
Performance Curve
Attributes
Attributes
Multi-Hole Mounting Base
Featuring a versatile multi-hole structural design, it can seamlessly replace market-leading mainstream brands. This allows for rapid pump installation and integration, significantly boosting operational efficiency.
Integrated Inlet/Outlet
The inlet and outlet are equipped with dedicated S300 Fittings, effectively minimizing the risk of chemical leakage and ensuring maximum fluid transfer safety.
Main Body Grooved Seal
The pump body and bellows utilize a threaded fastening and grooved sealing design. This drastically reduces the risk of component separation caused by high pressure or extreme temperatures, enhancing long-term durability and stability.
High-Density PTFE BELLOWS
Precision-machined from Daikin M112 high-purity, high-density PTFE. It exhibits superior ductility, wear resistance, and corrosion resistance, ensuring an extended operational lifespan.
Accessories
Accessories
Pulse Dampener
Absorbs periodic pressure fluctuations generated during pump operation to ensure process stability, while mitigating piping shocks and damage caused by pressure variations.
Quick Exhaust Valve
By optimizing the exhaust flow channel design, it reduces the dynamic resistance of bellows movement, thereby enhancing the stability of the pump's stroke operation.