DT Series
Features
Feature
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Certification Standards
All models fully comply with CE and relevant EU standards.
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100% Metal-Free & Oil-Free
Eliminates the need for lubrication and maintenance, ensuring zero contamination.
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Wetted Parts Material
Crafted entirely from PURE TEFLON, delivering exceptional chemical resistance, high-temperature durability, and an ultra-clean, contamination-free performance.
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Temperature Resistance
Capable of withstanding operating temperatures up to 200°C.
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Manufacturing Environment
Assembly, testing, and packaging are fully completed within a Class 100 cleanroom environment.
Application
Application
Photoresist Coaters, Coater Track, Wafer Cleaning Equipment, Etching Equipment, CMP (Chemical Mechanical Planarization) Equipment , Wet Processing Equipment
Wet Processing Cleaning Lines, Chemical Replenishment / Dosing Systems
Chemical Supply & Delivery, Transfer of Corrosive Chemicals (Strong Acids and Alkalis), Precision Laboratory Chemical Metering & Transfer
PCB Industry: Chemical Supply Systems, Etching Machines, Cleaning Lines.
Model
Model
Technical Data
200℃ (DT-20F)
10 KG (DT-20F)
Performance Curve
Technical Data
200℃ (DT-50F)
14 KG (DT-50F)
Performance Curve
Technical Data
200℃ (DT-80F)
20.5
Performance Curve
Technical Data
200℃
27 KG (DT-100F)
Performance Curve
Attributes
Attributes
Metal-Free Air Valve Assembly
Engineered completely without metal components to eliminate contamination risks. Its superior airtightness and low air consumption drastically enhance pump operational efficiency.
Ceramic Air Valve Shaft
Made of high-density ceramic to eliminate thermal expansion and contraction issues, ensuring highly precise and stable pump operation.
Spring-Loaded Check Valve
Features an recessed-groove design that achieves full surface-to-surface contact. This delivers an airtight seal and significantly superior self-priming performance.
High-Performance PTFE Bellows
Engineered from Daikin M112 high-purity, high-density PTFE, this component features exceptional ductility and chemical resistance. Precision machining guarantees ultimate durability and an extended service life.
Accessories
Accessories
Pulse Dampener
Absorbs periodic pressure fluctuations generated during pump operation to ensure process stability, while mitigating piping shocks and damage caused by pressure variations.
Cycle Counter
Can be integrated with external controllers to display the pump stroke count, enabling fully automated system control over pump operations.
Leak Detection Sensor
In the event of bellows failure or rupture, the sensor instantly detects chemical fluid entering the air chamber and sends a signal to the main control unit to immediately shut down pump operation.